Sputtering Capabilities
With over four decades of sputtering experience, Spectrum Microwave is the premier choice for thin film metallization solutions.
Besides standard metals like Gold, Nickel and Titanium Tungsten, we are also specialists in a number of exotic metals including:
- Platinum
- Chromium
- Palladium
- Aluminum
- Silver
- Copper
Spectrum Microwave's advanced sputtering systems can accomodate wafers as large as 12", Spectrum Microwave is not limited by even the largest size wafer requirements.
Metals and their Functions
| Material Function |
Material Type |
Range of Functions |
Comments |
| Resistors |
Tantalum-Nitride (TaN)
Nickel-Chromium (NiCr)
Chromium-Silicon (CrSi) |
10 - 150 Ω/square (Min)
20 - 350 Ω/square (Min)
500 - 1500 Ω/square |
Best for non-hermetic environment
Low TCR
Small package hi-value resistors |
| Adhesion |
Titamium - Tungsten (TiW)
Chromium (Cr) |
250 - 750 Angstroms
250 - 750 Angstroms |
Ideal for high temperatures
Low temperature limitation |
| Barriers |
Nickel (Ni) - Sputtered
Nickel (Ni) - Plated |
750 - 20000 Angstroms
40 - 100µ in. (1 - 2.5 µm) |
Standard barrier
High conductivity barrier |
| Conductors |
Copper (Cu)
Gold (Au) |
30 - 500µ in.
10 - 200µ in. (0.25 - 5 µm) |
High power/solderable
Tight tolerance
Fine line features available |
|
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